FIXING METHOD OF VINYL CHLORIDE RESIN FILM ONTO SILICON NITRIDE SURFACE

摘要

PURPOSE:To improve the durability of a vinyl chloride resin film by treating a silicon nitride surface with a prescribed material then forming said film onto the surface. CONSTITUTION:An ISFET having the silicon nitride surface is immersed for 1hr into an aq. 50% gamma-aminopropyl triethoxysilane soln. kept at 50 deg.C and thereafter the ISFET is taken out of the soln. and is immersed for 1min into a doping liquid prepd. by dissolving 1g vinyl chloride resin into 25g tetrahydrofurane and is dried at a room temp. The fixing of the vinyl chloride resin film onto the silicon nitride surface is thus executed.