发明名称 OPTICAL DISPLACEMENT MEASURING DEVICE
摘要 PURPOSE:To enable non-contactig measurement of lens, by arranging a pair of 1st and 2nd optical units at the bottom and on the top of a specimen with the specimen located in-between in such a way than each center line of 3-dimensional optic angle is possessed incommon and installing a means for detecting relative distance along the common center line of the 2nd unit relative to the 1st unit. CONSTITUTION:A pair of 1st and 2nd optical unit 26, 27 are arranged on the and bottom of a specimen with the specimen 18 located in-between in such a way that a center 28 of the 3-dimentional optic angle is possessed in common. And, an optical axis of the specimen 18 is oriented in the proper order on a line 28 for fastening, and by allowing the unit 26 to displace forward and backward relative to the surface 18A, an image developing unit 22 is observed with an observation optical system 24 and slits 13A, 13B of indicating marks 12A, 12B are brought coincidence on the unit 22. Then, a beam of light from projecting and reflecting optical systems 20A, 20B of the unit 26 intersects the surface 18A. Similarly, by allowing the unit 27 to dispalce by a displacing means 31, the beam of light is mode to intersect the surface 18B. At this moment, when a distance between the both units 26,27 is read out from output of a counter 34B in a displacement detecting means 34, the result represents non other than thickness of the specimen 18.
申请公布号 JPS61142407(A) 申请公布日期 1986.06.30
申请号 JP19840265832 申请日期 1984.12.17
申请人 MITSUTOYO MFG CO LTD 发明人 KOIZUMI OSAMU
分类号 G01M11/00;G01B11/00;G01B11/06;G01C3/00;G01C3/06 主分类号 G01M11/00
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