| 摘要 |
PURPOSE:To easily manufacture a magnetic levitation side, to accomplish high- rigidity, to increase load capacity and to improve stability by disposing two or more cylindrical guide rails piercing through the central portion of a table and two or more electromagnets, the attractive force of which can be controlled apart from each other in the moving direction of the table. CONSTITUTION:A cylindrical rail 4 is pierced through the central portion of a movable table 2 moving parallel to a base 3, and two magnetic levitation mechanisms formed by an 8-pole core opposite to the rail 4 and four electromagnets Mx, My, Mx', My' are provided in the moving direction. In this arrangement, the table 2 is floated from the base 3, and permanent magnet magnetic bearings 5, 5' are provided, thereby controlling rolling motion. The control axes X, Y of the 8-pole core are disposed in such a manner as to divide equally in the direction of gravity, thereby controlling pitching and yawing. Accordingly, manufacture can be facilitated, the load capacity in the direction of gravity can be increased, and high rigidity to yawing and pitching can be accomplished.
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