发明名称 MANUFACTURING EQUIPMENT FOR SEMICONDUCTOR
摘要 PURPOSE:To prevent a lead frame from levitating, to uniformize wettability of liquid-like adhesive paste and to eliminate the irregularity of a bonding strength by retaining the frame by a retaining lever, and retaining the coated paste by a retaining rod. CONSTITUTION:A lead frame 3 fed by a conveying mechanism is retained by a retaining lever 10, and liquid-like adhesive paste 2 is uniformly and accurately coated. After it is coated with the paste 2, when the predetermined frame 3 is coated with the paste 2, the already coated paste 2 is retained by a retaining rod 5. Thus, the wettability of the frame 3 with the paste 2 is improved. Accordingly, the reliability of the step of die bonding a semiconductor with the paste is improved to enhance the yield of assembling the element.
申请公布号 JPS6431424(A) 申请公布日期 1989.02.01
申请号 JP19870186732 申请日期 1987.07.28
申请人 MATSUSHITA ELECTRON CORP 发明人 TAKAOKA KIYOSHI
分类号 H01L21/52 主分类号 H01L21/52
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