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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6489331(A)
申请公布日期
1989.04.03
申请号
JP19870246555
申请日期
1987.09.29
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIBASHI MITSUHARU
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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