| 摘要 |
PURPOSE:To improve a soft magnetic property with sufficiently reduced coercive force and sufficiently increased saturation magnetic flux density by making a main magnetic film composed mainly of Fe and making such base metal Fe contain a very small quantity of one of elements selected from among Si, Ge, Y, C, and stacking the main magnetic film and an NiFe alloy film. CONSTITUTION:A magnetic film is prepared in a vacuum vessel at an argon gas pressure of 1X10<-4>Torr by stacking a main magnetic film 10 and a second magnetic film 11 on a layer basis or by a couple of layers alternately on a nonmagnetic substrate 12 such as glass or ceramic by means of an ion beam sputtering. FeSi is composed mainly of Fe, containing a very small quantity of Si in the range of 1.5-3.5at.%. The thickness of the FeSi film must be in the range of 0.01-0.5mum, whereas that of the NiFe alloy film 1-9nm. Then a rotating magnetic field of approximately 700 (Oe) is provided in a vacuum heated atmosphere whose degree of reached vacuum is 1X10<-6>-10<-6>Torr and whose temperature is 500-800 deg.C. In other words, a thermal treatment is made in a vacuum and rotating magnetic field for 1hour. |
