| 摘要 |
Turbo molecular e.g. for semiconductor device mfr. has a compound flow pump on forward step of a regenerative pump. The regenerative pump is constituted of arcuate eddy current grooves having a predetermined angle w.r.t. the surface of the outer periphery of a rotor and being circumferentially engraved in array in the rotor and an arcuate ventilating channel engraved in the circumferenctial direction in a stator. A partition is defined in the stator circumferentially partitioning the ventilating channel, so that the working range on the low vacuum side may be extended.
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