发明名称 INTEGRATED CIRCUIT AND MANUFACTURE OF SAID INTEGRATED CIRCUIT
摘要 PURPOSE: To improve the density of memory points by providing a recessed section, with which the extended part of a gap is limited, on a conductive band element containing an insulating material inside the gap with an upper insulating layer and extending a contact aperture toward the center of the extended part for self-aligning. CONSTITUTION: The insulating material is contained inside the gaps 15 and 15' between a conductive band element 13 and an upper insulating layer 32 above the conductive band element 13, the conductive band element 13 has a recessed section 17 for limiting extended parts 16 and 16' of gaps 15 and 15', and a contact aperture 18 has a contour extended toward the center of the extended parts 16 and 16' and placed in a fixed distance from the conductive band element 13. The contact aperture of a source is extended to the extended part positioned pentagonal suitable while being related with the extended part where the contact aperture of a drain is extended. Thus, the degree of integration of circuit can be improved.
申请公布号 JPH02177565(A) 申请公布日期 1990.07.10
申请号 JP19890276156 申请日期 1989.10.25
申请人 COMMISS ENERG ATOM 发明人 JIYOERU HAATOMAN
分类号 H01L21/8247;H01L23/485;H01L23/528;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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