| 摘要 |
<p>An avalanche photodiode having a beryllium guard ring. The beryllium is implanted at a dosage of at least 5 x 10?14 per cm2¿ and preferably at 3 x 10?15 per cm2¿ and subsequently annealed to provide a guard ring profile with a p+ core and a superlinearly graded tail. The doping profile of the guard ring immediately adjacent the core is superlogarithmic.</p> |
