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发明名称
DISPOSITIVO DI INTRODUZIONE DEI REAGENTI IN UN IMPIANTO DI DEPOSIZIONEDI METALLORGANICI ALLO STATO VAPORE
摘要
申请公布号
ITTO910129(V0)
申请公布日期
1991.06.04
申请号
IT1991TO00129U
申请日期
1991.06.04
申请人
CSELT - CENTRO STUDI E LABORATORI TELECOMUNICAZIONI S.P.A.
发明人
BERTONE DANIELE
分类号
C23C16/455;C30B25/14
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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