| 摘要 |
PURPOSE: To reduce contact resistance and improve the reliability of the mutual connection structure at the same time by making the structure have maximum height along the outer periphery and have a nearly flat center part surface area. CONSTITUTION: A mutually connected pattern consists of a 1st layer 4 and a 2nd layer 6 of aluminum and provided with double layers of, for example, 3 to 6μm in overall thickness. Then the metallic layer 6 is provided with a surface area 11, which is almost smooth in the area of its center part 9 and a edge part 8 which is raised so that the center part 9 has a nearly smooth surface area, but may have a small ball-shaped projection 7 of, for example, 1 to 3μm in size. Consequently, satisfactory electric contact is obtained, and the reliability of contact on a mutually connected structure 10 and substrate 1 can be improved. |
