FAST RESPONSE TIME MICROSENSORS FOR GASEOUS AND VAPOROUS SPECIES

摘要

Fast Response Time Microsensors For Gaseous And Vaporous Species The present invention relates to a sensor for gaseous and vaporous species. The sensor comprises a substrate having a surface having an opening therein. A gas and vapor permeable sensing electrode having front and back sides is located across the opening with the front side facing generally the same direction as does the surface. A gas flow path leads to the back side of the sensing electrode. An electrolytic medium is in contact with the front side of the electrode. An additional electrode is in contact with the electrolytic medium and is electronically isolated from the sensing electrode other than via the electrolytic medium. A gas sensor as described has a very fast response time and an extended lifetime and can be made selective for any of a number of different gaseous species.