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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH0474864(A)
申请公布日期
1992.03.10
申请号
JP19900189071
申请日期
1990.07.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TOMA KIYOKAZU;SUGITA RYUJI;HONDA KAZUYOSHI;KAWAWAKE YASUHIRO;ISHIDA TATSURO
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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