PRODUCTION OF ALUMINUM NITRIDE SUBSTRATE

摘要

PURPOSE:To offer a production method of aluminum nitride substrates with which calcination is performed at low temp. and moreover, massproduction is possible. CONSTITUTION:An AlN molded body is prepared from an aluminum nitride powder to which yittrium oxide is added by 5-10 pts.wt. to 1 pt.wt. of oxygen in the aluminum nitride powder. This molded body is calcined at >=1600 deg.C in nitrogen with using a boron nitride vessel as a calcination vessel.