| 摘要 |
<p>PURPOSE: To realize and maintain a clean processing environment without the bad influence to a cost and a wafer and the restriction to the freedom of a system design, at the transfer time of the wafer of a semiconductor. CONSTITUTION: The wafer 106 of a semiconductor is supported by the movable member 108 for transfering and a gas is supplied to the upperside of the wafer 106 surface therein after forming a control environment isolated from the surrounding environment by an environment control unit 120 and under this state, the wafer 106 is transfered from a certain location 104 to another location 104.</p> |
