| 摘要 |
PURPOSE:To provide the manufacture of a microlens for solid image pickup element, which can be easily formed by the use of an exposure device to be used for the formation of a solid image pickup element. CONSTITUTION:A microlens for solid image pickup element is manufactured by a process for forming a substrate-flattening layer 1 on a solid image pickup element, by a process for forming a thin film 2 in parts other than a microlens- forming part on said substrate-flattening layer 1, then by a process for forming a lens layer 4 thicker than said thin film 2 on the whole surface and further forming an upper flattening layer 5 on the lens layer, thereafter by a process for etching back said upper flattening layer 5 and lens layer 4 until the surface of said thin film 2 appears, and then by a process for forming the lens layer 4 into a lens-shape after removing said thin film 2. |
