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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH0590170(A)
申请公布日期
1993.04.09
申请号
JP19910246350
申请日期
1991.09.26
申请人
RICOH CO LTD
发明人
TEZUKA SHINJI
分类号
H01L21/205;H01L21/285;H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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