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经营范围
发明名称
LASER CVD THIN FILM FORMING APPARATUS
摘要
申请公布号
JPH05140753(A)
申请公布日期
1993.06.08
申请号
JP19910298871
申请日期
1991.11.14
申请人
OSAKA GAS CO LTD
发明人
INOUE NAOKI;NAKAOKA HARUYUKI;AZUMA HIDEKI;MORIKAWA SHIGERU
分类号
C23C16/48;C23C16/52
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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