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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH0657434(A)
申请公布日期
1994.03.01
申请号
JP19920216814
申请日期
1992.08.14
申请人
CHUGAI RO CO LTD
发明人
MURAKAMI KOJI;MATSUMURA ETSUZO
分类号
C23C16/50;H01L21/205;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
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地址
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