| 摘要 |
FIELD: electricity. ^ SUBSTANCE: invention is intended for application in multi-chamber installations of molecular-beam epitaxy, spraying installations and other technological systems, where for provision of technological cycle it is necessary to transfer plate items or cassettes with wafers from one vacuum volume to the other one. Vacuum slot valve contains casing with through coaxial holes in the form of slots, lock body and stem. Stem is actuated by control body. Lock body contains lock element, support plate and pressing facilities. Lock body additionally contains hollow bearing beam. Bearing beam is installed between lock element and support plate and is connected with them. Inside bearing beam pressing facilities are located evenly along the whole length of lock element. Stem contains accessories for interaction with pressing facilities and hollow bearing beam. ^ EFFECT: invention makes it possible to increase device operation reliability and reduce valve dimensions. ^ 6 cl, 5 dwg |
