发明名称 |
System, Method, and Computer-Readable Medium for Performing Data Preparation for a Mask Design |
摘要 |
A method, computer-readable medium, and system for performing data preparation are provided. An integrated circuit design is received, and a plurality of pre-optical proximity correction processes are invoked such that the plurality of pre-optical proximity correction processes are performed in parallel. An optical proximity correction process is invoked in response to a determination that each of the plurality of pre-optical proximity correction processes have completed. A post-optical proximity correction process is invoked in response to a determination that the optical proximity correction process has completed
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申请公布号 |
US2008263501(A1) |
申请公布日期 |
2008.10.23 |
申请号 |
US20070738844 |
申请日期 |
2007.04.23 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHEN PENG-REN;HUANG CHIEN-CHAO;TU CHIH-CHIANG |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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