发明名称 SEMICONDUCTOR WORKPIECE CARRIERS AND METHODS FOR PROCESSING SEMICONDUCTOR WORKPIECES
摘要 Semiconductor workpiece carriers and methods for processing semiconductor workpieces are disclosed herein. In one embodiment, a semiconductor workpiece carrier assembly includes (a) a support structure having an opening sized to receive at least a portion of a semiconductor workpiece, and (b) a replaceable carrier positioned at the opening. The replaceable carrier includes a base and an adhesive layer on the base. The base has a surface, and the adhesive layer covers only a section of the surface of the base. The adhesive layer releasably attaches the replaceable carrier to the support structure.
申请公布号 US2008261383(A1) 申请公布日期 2008.10.23
申请号 US20070742115 申请日期 2007.04.30
申请人 MICRON TECHNOLOGY, INC. 发明人 NEO CHEE PENG;TEO HONG HAK;SUKAMI JAMILON BIN
分类号 H01L21/02;B32B27/00 主分类号 H01L21/02
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