Supporting Member For Thin-Film-Coated Boards, Storage Container For Thin-Film-Coated Boards, Mask-Blank-Storing Body, Transfer-Mask-Storing Body, and Method For Transporting Thin-Film-Coated Boards

摘要

The present invention provides a supporting member for thin-film-coated boards that is capable of sufficiently suppressing dust generated because of particles and the like. The present invention also provides a storage container suitable for storing thin-film-coated boards that has such a supporting member so as to store the thin-film-coated boards at a high level of cleanliness. The supporting members ( 2 ) and ( 5 ) have supporting means for supporting the thin-film-coated boards ( 1 ) such as mask blanks. The surface of at least a portion of the supporting means that comes into contact with the thin-film-coated boards ( 1 ) is permitted to be a smooth plane having an arithmetic average surface roughness (Ra) of 0.1 mum or lower. The surface of at least the portion of the supporting means that comes into contact with the thin-film-coated boards ( 1 ) is composed of, for instance, a resin material. The supporting members ( 2 ) and ( 5 ) are used to support the thin-film-coated boards ( 1 ) in the storage container having the supporting members to support the thin-film-coated boards ( 1 ) in a fixed state.