| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wiring substrate wherein a metal layer having a nano- and micro-pattern is accurately and locally formed, and its manufacturing method. <P>SOLUTION: The method of manufacturing a wiring substrate 100 includes a step to form a sacrifice layer of a first pattern on the substrate 10; a step to form a catalyst layer of a second pattern on the substrate; a step to deposit a metal layer on the catalyst layer of the second pattern by immersing the substrate in a nonelectrolytic plating liquid; and a step to remove the sacrifice layer by heating and to form a metal layer 34 of a third pattern. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
