| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of highly accurately attaching and depositing a flexible material on a substrate. SOLUTION: The attaching method attaches the flexible material having a plurality of marks on a substrate having marks corresponding to the marks provided on the material. The method includes a step of acquiring image data of the flexible material, a step of acquiring image data of the substrate, a step of calculating an error angle between at least a line connecting the marks of the substrate and a line for connecting the marks of the flexible material corresponding to the line of the substrate, a step of rotating the flexible material or the substrate by an angle calculated using the error angle, a step of calculating at least a displacement between the marks of the substrate and the marks of the flexible material, and a step of moving the flexible material or the substrate using the calculated displacement. COPYRIGHT: (C)2009,JPO&INPIT
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