| 摘要 |
An exemplary alignment apparatus ( 20 ) includes a supporting member ( 24 ), a conveyor ( 25 ), and a high-pressure fluid generator ( 21 ). The supporting member is configured for supporting a substrate ( 23 ) having an alignment layer ( 26 ). The conveyor is configured for conveying the supporting member along a predetermined direction. The high-pressure fluid generator is configured for generating and ejecting high-pressure fluid onto a surface of the alignment layer of the substrate to form an alignment surface. Because the alignment apparatus includes the high-pressure fluid generator which can eject high-pressure fluid to impact the surface of the alignment layer in order to form an alignment surface, no debris is introduced. Therefore, the substrates processed by the alignment apparatus can have improved quality and reliability.
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