| 摘要 |
PROBLEM TO BE SOLVED: To center a wafer etc., and also to position the wafer at an angle of rotation without using a tray nor horizontally moving it. SOLUTION: A position alignment device has a table 3 provided so that it can be elevated in vertical direction, and a plurality of gage pins 4 each having a tilt portion coming into contact obliquely with an outer peripheral bottom end portion of the wafer and fixed at a predetermined circumferential position of the table 3. An outer peripheral bottom portion of the wafer is mounted on tilt portions of the plurality of gage pins 4. After the wave is mounted, the wafer on a table surface is moved up and down by elevating the table 3 in the vertical direction by an elevation mechanism to center the position with the tilt portions of the gage pins 4. Further, the wafer is put apart from the gage pins 4 by elevating the table 3. While the wafer is fixed on the table surface by sucking air from a suction hole 17 by a suction mechanism, the table is horizontally rotated by a rotating mechanism until a sensor 20 detects a positioning mark of the wafer, thereby positioning the wafer. COPYRIGHT: (C)2009,JPO&INPIT |
