| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of using a femtosecond laser beam and even exploiting its advantages and performing highly accurate measurement. SOLUTION: The measuring apparatus for measuring the shape of an object to be inspected T on the basis of measuring light from a light source (laser light source 11) irradiated to the object to be inspected and its optical return reflected at the object to be inspected includes a deflection part (deflecting element 23) having a rotatable reflecting plane (MEMS mirror 231) for irradiating the object to be inspected with the measuring light and reflecting the optical return returning through the same optical path as the measuring light; a deflection amount detection part (a mirror array 25 and a position sensor 26) for detecting the amount of deflection of the reflecting plane on the basis of monitoring light passing through an optical path different from the measuring light and reflected at the reflecting plane; and a prevention part (isolator 27) for preventing the monitoring light from the deflection amount detection part from merging with the optical return passing through the optical path of the measuring light. COPYRIGHT: (C)2009,JPO&INPIT
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