| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a single crystal capable of manufacturing a high-quality single crystal with less crystal defects, a single crystal material manufactured by the apparatus for manufacturing a single crystal, an electronic component, and a method for manufacturing a single crystal. SOLUTION: The apparatus for manufacturing a single crystal is equipped with a metal crucible 101 which stores a single crystal raw material 102, a heating means for high frequency heating the metal crucible 101 (high frequency induction heating coils 103, a high frequency heating power source 104), a temperature sensor shielded by an electromagnetic shield 109 for detecting the temperature of the metal crucible 101 by a thermocouple 110, a means for growing a single crystal 107 from the raw material melt 102 in the metal crucible 101, and a temperature controller 111 which is a control means for controlling the heating means. The temperature controller 111 controls the temperature of the raw material melt 102 through the single crystal growth process by controlling the heating means based on the signal detected by the temperature sensor. COPYRIGHT: (C)2009,JPO&INPIT
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