ORDERED ARRAY OF NANOSTRUCTURES AND METHOD OF FABRICATION

摘要

The present invention relates to nanostructured materials. In particular, but not exclusively, the invention relates to an ordered array of needle-like nanostructures, and a method of forming such an ordered array. Embodiments of the invention provide a method of fabricating an ordered array of nanostructures comprising the steps of: forming a first layer comprising a first material on a substrate comprising a second material; patterning the first layer to form a patterned structure comprising an array of pillars; and subsequently irradiating the patterned structure with ions.