| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device, effectively generating clusters and selectively recovering clusters with desired polarity. SOLUTION: By making electrically float at least a part of a cylindrical body structuring a cluster generation chamber of a cluster generation device by a magnetron sputtering method, a whole or a part of its inner wall surface is made to be charged as the same polarity with the cluster having the desired polarity. COPYRIGHT: (C)2009,JPO&INPIT
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