| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of measuring accurate mass change or viscosity change. SOLUTION: In the method for measuring a change of a mass load to a piezoelectric element or a surface elastic wave element based on a prescribed frequency change, conductance (G) and susceptance near a resonance frequency of the piezoelectric element or near a center frequency of the surface elastic wave element are measured, and when determining a prescribed frequency from an admittance circle diagram acquired resultantly, a circle diagram is determined by circular approximation from a measuring point excluding spurious on the higher frequency side than the measured resonance frequency, and a frequency on calculation for imparting the maximum value of the conductance and a frequency for imparting the maximum value of the susceptance are determined by using the maximum value of the conductance, the maximum value of the susceptance, and the measured conductance and susceptance in the circle diagram, and then a frequency for imparting the minimum value of the susceptance is determined, and at least a change of the second half-value frequency is measured. COPYRIGHT: (C)2009,JPO&INPIT
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