发明名称 LIGHT-EMITTING APPARATUS AND PRODUCTION METHOD THEREOF
摘要 Provided is a method of producing a light-emitting apparatus having a field effect transistor for driving an organic EL device, the field effect transistor including an oxide semiconductor (4) containing at least one element selected from In and Zn, the method including the steps of : forming a field effect transistor on a substrate (1); forming an insulating layer(7); forming a lower electrode (8) on the insulating layer; forming an organic layer (10) for constituting an organic EL device on the lower electrode; forming an upper electrode (11) on the organic layer; and after the step of forming the semiconductor layer of the field effect transistor and before the step of forming the organic layer, performing heat treatment such that an amount of a component that is desorbable as H20 from the field effect transistor during the step of forming the organic layer is less than 10-5 g/m2.
申请公布号 WO2008126879(A1) 申请公布日期 2008.10.23
申请号 WO2008JP57047 申请日期 2008.04.03
申请人 CANON KABUSHIKI KAISHA;WATANABE, TOMOHIRO 发明人 WATANABE, TOMOHIRO
分类号 H01L27/32 主分类号 H01L27/32
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