| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a walking beam type heat treatment device without bringing a coating layer of a rear face of a substrate into contact with a supporting pin. <P>SOLUTION: This walking beam type heat treatment device 10 is provided with (a) a side edge supporting projection 94 abutting on a side edge of the substrate 16 and projectingly provided from a pair of fixed beams 20 to horizontally support the substrate 16, and (b) front edge supporting projection 96 and rear edge supporting projection 98 abutting on front edge 16f and rear edge 16r of the substrate 16 and projectingly provided from a movable beam 22 to horizontally support the substrate 16. The side edge supporting projection 94 abuts on the side edge and thereby the substrate 16 is supported by the pair of fixed beams 20. The front edge supporting projection 96 and the rear edge supporting projection 98 abut on the front edge 16f and rear edge 16r and thereby the substrate 16 is supported by the movable beam 22. As a result, the substrate 16 is carried without having any member abutting on the rear face. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
