| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus and coating liquid application method capable of reducing its processing time. SOLUTION: The coating liquid application method comprises a step of preparing a coating process for a first substrate to be treated in a first cleaning section, a step of subsequently introducing the first substrate onto a fixed unit, a step of coating the surface of the first substrate with a coating liquid by causing a coating unit to move from the first cleaning section along a first direction of the fixed unit, steps of removing the first substrate from the fixed unit and subsequently introducing a second substrate to be treated thereonto while preparing a coating process for the second substrate in a second cleaning section, and a step of coating the surface of the second substrate by causing the coating unit to move from the second cleaning section along a second direction opposite to the first direction, whereby the processing time as well as the cost for coating can be reduced. COPYRIGHT: (C)2009,JPO&INPIT
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