| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily identify time and place of abnormality occurrence, etc., at all times, when an abnormality occurs at a solid-state device manufacturing APPARATUS. SOLUTION: A state data collecting part 31 collects a state data which represent the state of a semiconductor device manufacturing device, and a collected data accumulation part 32 sequentially accumulates the collected data. A display data generating part 33 generates a current state display data of the device based on the collected data of the state data collecting part 31, while generating a state transition display data of the device based on the accumulated data of the collected data accumulation part 32. A current state display data storage part 34 stores the current state display data, while a state transition display data storage part 35 stores the state transition display data. A display part 36 displays as an image, the current state or the state transition of the device, and a display control part 37, controls display action of the display part 36, based on the stored data in the display data storage parts 34 and 35.</p> |
