| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a low-cost and highly accurate master disk for a aperture conversion type optical waveguide by a simple method and to provide a method to easily manufacture an optical waveguide using the above method. SOLUTION: (A) the method of manufacturing the master disk is provided in which (1) on an electrodeposition substrate having power feeding terminals on the tip part of an electrically conductive thin film, an electrodeposition/photosensitive film forming material is electrodeposited to deposit an electrodeposition layer, a photosensitive resin layer is formed on the above layer and the layer is exposure developed in a core shape, or (2) an optical semiconductor film of an optical electrodeposited substrate is irradiated with light while adjusting exposure strength etc., to deposit a film (a projecting part) having different cross sectional areas in a longitudinal direction, or (3) a film is deposited on an optical electrodeposited substrate having grooves so that the film thicknesses are varied along the longitudinal direction similar to (2) and the groove shape is made correspond to the core shape and then, electroforming is applied to the groove etc., and the electroformed section is peeled off. (B) the method of manufacturing an aperture converting type high polymer optical waveguide is provide in which a hardening layer of casting forming hardening resin is formed on the above master disk and the layer is peeled off, is adhered to a clad member, core hardeng resin is filled into a gap section and is peeled off the hardened resin. COPYRIGHT: (C)2004,JPO&NCIPI |
