摘要 |
PROBLEM TO BE SOLVED: To provide a slit scanning confocal microscope in which the resolution of a specimen in a depth direction is enhanced. SOLUTION: A slit-shaped image of a light source 1 is imaged on an imaging face of the specimen 3 by using a slit-shaped light source 1 and an illumination optical system 2. Thus, the light generated from the specimen 3 forms the image of light generated from the specimen 3 on a line sensor 5 which is a one-dimensional imaging device with an imaging optical system 4. A line sensor (b) is provided at a position conjugate with the slit-shaped light source 1 and outputs a signal Sb, and auxiliary line sensors (a) and (c) are provided at the side of the line sensor (b), and emit signals Sa and Sc, respectively. The resolution of the specimen in the depth direction is enhanced by forming the image on the basis of the difference of signals äSb-(Sa+Sc)} which is used as a corrected output of the line sensor (b). COPYRIGHT: (C)2008,JPO&INPIT
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