| 摘要 |
PROBLEM TO BE SOLVED: To detect the presence of defects (cracks) in a ceramics layer covering the openings of pressure chambers at high precision. SOLUTION: A piezoelectric actuator has a first ceramics layer 41 directly covering the openings of the pressure chambers, a first electrode 51 formed in the form of a plane over the plurality of pressure chambers, a second ceramics layer 42, second electrodes 52, a third ceramics layer 43, and a third electrode 53 in the above described order from the pressure chamber side. In the state in which the pressure chambers are filled with ink, the insulation resistance between a cavity unit and the first electrode 51 is measured, thereby detecting defects in the ceramics layer 41. COPYRIGHT: (C)2008,JPO&INPIT
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