SURFACE FILM MEMBER, PROCESS FOR RPODUCING THE SURFACE COVERING MEMBER, CUTTING TOOL, AND MACHINE TOOL

摘要

This invention provides a surface covering member having a high level of hardness and excellent oxidation resistance, a process for producing the surface covering member, a cutting tool, and a machine tool. An oxidation-resistant film layer comprising Li and a composite oxide of Li and at least Al as a main component is covered on the surface of a base material formed of a hard material either directly or through a high-hardness film layer. The production process of a surface film material comprises providing a holder disposed within a hermetically sealable vessel, supporting the base material as such or a high-hardness film layer covering material comprising a high-hardness film layer covered on the surface of the base material within the vessel, disposing a target for composite oxide formation, comprising Li and at least Al as main components within the vessel, supplying oxygen into the vessel, and causing discharge between the target for oxidation-resistant film layer formation and the holder using the target for oxidation-resistant film layer formation as an anode and the holder as a cathode to form an oxidation-resistant film on the surface of the base material or the high-hardness film layer covering material.