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发明名称
Vorrichtung zum Härten einer Beschichtung und Vorrichtung zum Beschichten
摘要
申请公布号
DE69838690(T2)
申请公布日期
2008.08.28
申请号
DE19986038690T
申请日期
1998.12.15
申请人
TOKYO ELECTRON LTD.
发明人
TAKESHITA, KAZUHIRO;NAGASHIMA, SHINJI;MURAMATSU, MAKOTO;MIZUTANI, YOJI;YANO, KAZUTOSHI;KATAYAMA, KYOSHIGE
分类号
H01L21/00;B05D1/00;B05D3/04;H01L21/312;H01L21/316
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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