摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave filter using lithium-tantalate single crystal, which is less in the generation of static electricity caused by a temperature change and can quickly self-neutralize electric charges even when electric charges are generated, as a piezoelectric substrate, and to provide its manufacturing method. <P>SOLUTION: The surface acoustic wave filter has the piezoelectric substrate which is made of the lithium-tantalate single crystal containing one kind of additive element selected from copper, manganese, cobalt, nickel and yttria in the ratio of ≥0.01 wt.% and ≤1.00 wt.% and having an electric charge self-neutralization property for self-neutralizing and removing surface electric charges. <P>COPYRIGHT: (C)2008,JPO&INPIT |