| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating device which generates plasma inside a chamber and provide a cooling method of the plasma generating device in which a chamber can be cooled down effectively in a simple structure. <P>SOLUTION: The plasma generating device is provided with a chamber 20 inside of which plasma is generated and an approximately airtight shield 40 enclosing the chamber 20 from outside with a predetermined distance. The shield 40 is provided with aperture portions 41, penetrating from the inside to the outside of the shield 40. Furthermore, a sirocco fan 50 is provided to intake air from the inside of the shield 40 and exhaust to the outside of the shield 40. <P>COPYRIGHT: (C)2008,JPO&INPIT |
