| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for determining a position of a substrate disposed on a supporting plate, and also to provide a method and device for processing the substrate. SOLUTION: The position of the substrate disposed on the supporting plate is known by measuring a temperature of the supporting plate. The substrate is disposed on the supporting plate, then the temperature of the substrate is measured, and the measured temperature is compared with a reference temperature, when the measured temperature is within the reference temperature, it is determined that the substrate is disposed in a correct position, while when the measured temperature is not within the reference temperature, it is determined that the substrate is not disposed at a correct position. When it is determined that the substrate is not disposed at a correct position, an alarm is generated or process step for the substrate is interrupted. COPYRIGHT: (C)2008,JPO&INPIT |
