| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator capable of stably generating and maintaining high-density and high-energy-efficiency inductively-coupled microplasma, and of executing a process using the plasma. <P>SOLUTION: This plasma generator equipped with an inductively-coupled plasma generation coil 9 around an insulator tube, and also equipped with electrodes 3 and 4 for generating dielectric barrier discharge inside and outside of the tube is composed. By connecting the metal electrodes and a coil part to various power sources through cables, inductively-coupled plasma by dielectric barrier discharge, in particular, microplasma having a size not larger than 1 mm which becomes difficult to stably maintain by miniaturization is generated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
