| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-fluid cleaning control method and a two-fluid cleaning apparatus for preventing a liquid from flowing backward into gas piping of a two-fluid jet nozzle. SOLUTION: The two-fluid cleaning control method comprises the step 100 of supplying a gas to a two-fluid jet means by a gas supply means, the step 110, 120 of supplying a liquid to the two-fluid jet means by a liquid supply means after the passage of a predetermined time from the start of the gas supply, and the step 130, 140 of judging gas pressure of the gas supply means, and stopping the liquid supply by the liquid supply means when the gas pressure becomes equal to or lower than a predetermined value. COPYRIGHT: (C)2008,JPO&INPIT
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