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发明名称
VERFAHREN UND VORRICHTUNG ZUR BESTIMMUNG DES VERZIEHENS EINER HALBLEITERSCHEIBE
摘要
申请公布号
DE60039491(D1)
申请公布日期
2008.08.28
申请号
DE20006039491
申请日期
2000.08.14
申请人
NXP B.V.
发明人
SCHOBER, JOACHIM
分类号
G01B11/30;G01B21/00;G01B5/00;G01B5/28;G01B7/34;G01B21/30;H01L21/66
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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