| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL display in which a position shift after positioning of a mask and a substrate is controlled and a pattern deposition of an organic compound layer of an organic light emitting element can be made in a high resolution. SOLUTION: A positioning of a mask 14 and a substrate 20 is conducted inside a deposition chamber 1, and the substrate 20 and a vapor deposition source 11 are moved relatively to conduct a deposition of the organic compound layer. In the deposition chamber 1, there are provided a mask supporting table 12 for supporting the mask 14 and a mask supporting table shifting mechanism 13 which moves the mask supporting table 12 to a position not interfering with the vapor deposition source 11 after a positioning of the mask 14 and the substrate 20 is conducted and they are connected tight. After a deposition is over, the substrate 20 and the mask 14 are released from a state of a tight connection on the mask supporting table 12. COPYRIGHT: (C)2008,JPO&INPIT
|
