发明名称 |
Polishing apparatus |
摘要 |
<p>In polishing apparatus of the present invention, collars (23) can be easily exchanged. The polishing apparatus comprises: an outer pin gear (11) having an inner gear section (11a); an inner pin gear (12) having an outer gear section (12a); and a carrier (13) having outer gear teeth (13a); which are engaged with the inner gear section (11a) of the outer pin gear (11) and the outer gear section (12a) of the inner pin gear (12) so as to rotate and move the carrier around the inner pin gear (12). At least one of the inner gear section (11a) and the outer gear section (12a) includes gear teeth (20, 30), each of which comprises: a pin proper (22) being fixed to a pin ring (11b, 12b) and extended upward therefrom; a cylindrical collar (23) rotatably covering and fitting the pin proper (22) at a fitting section (25).</p> |
申请公布号 |
EP1688218(B1) |
申请公布日期 |
2008.06.18 |
申请号 |
EP20060250608 |
申请日期 |
2006.02.03 |
申请人 |
FUJIKOSHI MACHINERY CORPORATION |
发明人 |
MIYASHITA, TADAKAZU;KOYAMA, HARUMICHI;NAKAMURA, MITSUHIRO |
分类号 |
B24B37/08;F16H1/28;F16H1/34;F16H1/48;F16H57/02;H01L21/304 |
主分类号 |
B24B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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