| 摘要 |
A substrate processing apparatus, a substrate transferring method, and a recording medium of a recording computer program are provided to enhance accuracy in a substrate transferring process by improving a structure thereof. A process chamber is formed to store a substrate loading plate and to perform a predetermined process on the substrate loading plate. A temperature sensor(131,132) detects the temperature of the process chamber. A transfer unit loads the substrate into the substrate or unloads the substrate from the substrate. The transfer unit includes a main body and a transfer control unit(55) for controlling a substrate transferring operation. The transfer control unit corrects the reference position of the main body within the process chamber according to the displacement of the process chamber corresponding to the detected temperature and controls the substrate transferring operation on the basis of the corrected reference position.
|
